Non-volatile magnetic memory with low switching current and high thermal stability

ABSTRACT

A non-volatile current-switching magnetic memory element includes a bottom electrode, a pinning layer formed on top of the bottom electrode, and a fixed layer formed on top of the pinning layer. The memory element further includes a tunnel layer formed on top of the pinning layer, a first free layer formed on top of the tunnel layer, a granular film layer formed on top of the free layer, a second free layer formed on top of the granular film layer, a cap layer formed on top of the second layer and a top electrode formed on top of the cap layer.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a divisional of application of U.S. application Ser.No. 11/739,648 entitled “Non-Volatile Magnetic Memory with Low SwitchingCurrent and High Thermal Stability”, filed on Apr. 24, 2007, by Ranjanet al., which is a continuation-in-part of U.S. patent application Ser.No. 11/674,124 entitled “Non-uniform Switching Based Non-VolatileMagnetic Base Memory”, filed on Feb. 12, 2007 and a continuation-in-partof U.S. patent application Ser. No. 11/678,515 entitled “A High CapacityLow Cost Multi-State Magnetic Memory”, filed on Feb. 23, 2007, thedisclosures of which are incorporated herein by reference, as though setforth in full.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates generally to non-volatile magnetic memoryand particularly to non-volatile magnetic memory with low switchingcurrent and high thermal stability.

2. Description of the Prior Art

Computers conventionally use rotating magnetic media, such as hard diskdrives (HDDs), for data storage. Though widely used and commonlyaccepted, such media suffer from a variety of deficiencies, such asaccess latency, higher power dissipation, large physical size andinability to withstand any physical shock. Thus, there is a need for anew type of storage device devoid of such drawbacks.

Other dominant storage devices are dynamic random access memory (DRAM)and static RAM (SRAM) which are volatile and very costly but have fastrandom read/write access time. Solid state storage, such assolid-state-nonvolatile-memory (SSNVM) devices having memory structuresmade of NOR/NAND-based Flash memory, providing fast access time,increased input/output (IOP) speed, decreased power dissipation andphysical size and increased reliability but at a higher cost which tendsto be generally multiple times higher than hard disk drives (HDDs).

Although NAND-based flash memory is more costly than HDD's, it hasreplaced magnetic hard drives in many applications such as digitalcameras, MP3-players, cell phones, and hand held multimedia devices due,at least in part, to its characteristic of being able to retain dataeven when power is disconnected. However, as memory dimensionrequirements are dictating decreased sizes, scalability is becoming anissue because the designs of NAND-based Flash memory and DRAM memory arebecoming difficult to scale with smaller dimensions. For example,NAND-based flash memory has issues related to capacitive coupling, fewelectrons/bit, poor error-rate performance and reduced reliability dueto decreased read-write endurance. Read-write endurance refers to thenumber of reading, writing and erase cycles before the memory starts todegrade in performance due primarily to the high voltages required inthe program, erase cycles.

It is believed that NAND flash would be extremely difficult to scalebelow 45 nanometers (nm). Likewise, DRAM has issues related to scalingof the trench capacitors leading to very complex designs which arebecoming increasingly difficult to manufacture, leading to higher cost.

Currently, applications commonly employ combinations of EEPROM/NOR,NAND, HDD, and DRAM as a part of the memory in a system design. Designof different memory technology in a product adds to design complexity,time to market and increased costs. For example, in hand-heldmulti-media applications incorporating various memory technologies, suchas NAND Flash, DRAM and EEPROM/NOR flash memory, complexity of design isincreased as are manufacturing costs and time to market. Anotherdisadvantage is the increase in size of a device that incorporates allof these types of memories therein.

There has been an extensive effort in development of alternativetechnologies, such as Ovanic Ram(or phase-change memory), Ferro-electricRam(FeRAM), Magnetic Ram(MRAM), Nanochip, and others to replace memoriesused in current designs such as DRAM, SRAM, EEPROM/NOR flash, NAND flashand HDD in one form or another. Although these various memory/storagetechnologies have created many challenges, there have been advances madein this field in recent years. MRAM seems to lead the way in terms ofits progress in the past few years to replace all types of memories inthe system as a universal memory solution.

One of the problems with prior art memory structures is that the currentand power requirements are too high to make a functional memory deviceor cell. This also poses a key concern regarding the reliability of suchdevices due to likely dielectric break-down of the tunneling barrierlayer and thereby making it non-functional.

The challenge with other prior art techniques has been that theswitching current is too high to allow the making of a functional devicefor memory applications due to the memory's high power consumption.Several recent publications have shown that the switching current can bereduced by having the memory element pinned by two anti-ferromagnetic(AF)-couple layers resulting in spin oscillations or “pumping” andthereby reducing the switching current.

In certain non-volatile magnetic memory cells, while switching currenthas been lowered, thermal stability has also been lowered as a resultthereof. That is, attempts to lower the switching current are known tolead to lower thermal stability. Low thermal stability is undesirablebecause, among other reasons, it leads to unwanted switching of magneticmoment.

What is needed is non-volatile magnetic memory having low switchingcurrent and high thermal stability.

SUMMARY OF THE INVENTION

To overcome the limitations in the prior art described above, and toovercome other limitations that will become apparent upon reading andunderstanding the present specification, the present invention disclosesa method and a corresponding structure for a magnetic storage memorydevice that is based on current-induced-magnetization-switching havingreduced switching current in the magnetic memory.

Briefly, an embodiment of the present invention includes a non-volatilecurrent-switching magnetic memory element including a bottom electrode;a pinning layer formed on top of the bottom electrode; a fixed layerformed on top of the pinning layer; a tunnel layer formed on top of thepinning layer; a first free layer formed on top of the tunnel layer; agranular film layer formed on top of the first free layer; a second freelayer formed on top of the granular film layer; a cap layer formed ontop of the second free layer; and a top electrode formed on top of thecap layer.

These and other objects and advantages of the present invention will nodoubt become apparent to those skilled in the art after having read thefollowing detailed description of the preferred embodiments illustratedin the several figures of the drawing.

IN THE DRAWINGS

FIG. 1 shows relevant layers of a non-volatile current-switchingmagnetic memory element 100 are shown, in accordance with an embodimentof the present invention.

FIG. 2 shows further layers of the memory element 100, in accordancewith an embodiment of the present invention.

FIG. 3 shows further details of the layer 120, in accordance with anembodiment of the present invention.

FIGS. 4( a) and 4(b) each show further details of the layer 120 of thememory element 100.

FIG. 5 shows a non-volatile current-switching magnetic memory element200 in accordance with another embodiment of the present invention.

FIG. 6 shows a non-volatile current-switching magnetic memory element300 in accordance with yet another embodiment of the present invention.

FIG. 7 shows a graph 702 of the thermal stability (shown on the y-axis)relative to the write-ability (shown on the x-axis).

FIGS. 8-10 show distances between memory cells made of the variousmemory elements of the embodiments of the present invention.

FIG. 11 shows the memory element 1100, in accordance with anotherembodiment of the present invention.

FIG. 12 shows a memory architecture incorporating the memory elements ofthe various embodiments of the present invention.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

In the following description of the embodiments, reference is made tothe accompanying drawings that form a part hereof, and in which is shownby way of illustration of the specific embodiments in which theinvention may be practiced. It is to be understood that otherembodiments may be utilized because structural changes may be madewithout departing from the scope of the present invention. It should benoted that the figures discussed herein are not drawn to scale andthicknesses of lines are not indicative of actual sizes.

In an embodiment of the present invention, a magnetic memory cell isdisclosed. In one embodiment of the present invention, a magnetic tunneljunction (MTJ) is formed of at least three layers, a barrier (or tunnel)layer formed between a fixed layer and a free layer for storing digitalinformation.

Referring now to FIG. 1, relevant layers of a non-volatilecurrent-switching magnetic memory element 100 are shown, in accordancewith an embodiment of the present invention. The memory element 100 isshown to include a fixed layer 102 on top of which is formed a tunnellayer 104 on top of which is formed a free layer 106. In the embodimentof FIG. 1, the free layer is multi-layered, as shown in FIG. 2.

FIG. 2 shows further layers of the memory element 100, in accordancewith an embodiment of the present invention. In FIG. 2, a bottomelectrode 108 is shown and deposited on a substrate and on top of thebottom electrode 108 is shown formed a pinning layer 110 on top of whichis shown formed a fixed layer 112, on top of which is shown formed atunnel (or barrier) layer 114, on top of which is shown formed a freelayer 116, on top of which is shown formed a granular film layer 118, ontop of which is shown formed a free layer 120, on top of which is shownformed a cap layer 122, on top of which is shown formed a top electrode124. The top electrode 124 and the bottom electrode 108 are each made ofTantalum (Ta) in an exemplary embodiment although other suitablematerials are contemplated. This layer may contain additionalnon-magnetic layers the choice of which depends on the choice of the“etching” process which is used to define the magnetic memory element,as described below. For example, the etching process of choice istypically a reactive-etching process including gases such as carbonmonoxide (CO), ammonia (NH₃), chlorine (Cl₂) due to its faster etchingrate. Other choice may include ion-beam etching which is generallyslower than the reactive-etching process but has different selectivityin regards to the relative etching rates of the various atomic elementsof the different layers of the magnetic-memory cell. The layers 112through 120 are shown to form a MTJ 126.

In FIG. 2, the MTJ 126 is for storing a bit of information or twostates, ‘1’ and ‘0’, with a single bit representing two binary states,i.e. ‘1’ and ‘0’. Exemplary material from which the various layers ofthe memory element 100 are made and their respective exemplarythicknesses will now be presented. It should be noted that thesematerial and sizes are merely examples and other suitable types ofmaterial and sizes of these layers are anticipated.

In FIG. 2, the layers 116 through 120 make up the layer 106 of FIG. 1.Likewise, the layer 112 of FIG. 2 is the same as the layer 102 ofFIG. 1. The layer 114 of FIG. 2 is the same as the layer 104.

In one embodiment of the present invention, the layer 114 is made ofmagnesium oxide (MgO). In other embodiments, the layer 114 may be madeof titanium oxide(TiO₂), aluminum oxide (Al₂O₃), Magnesium oxide (MgO),tantalum oxide (Ta₂O₅), hafnium oxide (HfO₂), zirconium oxide (ZrO₂),tantalum nitride (TaN), strontium oxide (SrO) or ruthenium oxide (RuO).The layers 116 and 120 are each typically less than 20 nm in thicknessand typically have a ratio, in thickness of 5 to 1. The layer 116 istypically made of magnetic material whose grains are exchange coupled.The alloy in the layer 116 comprises of one or many of cobalt(Co),iron(Fe) and nickel(Ni) with less than 16 atomic percent of boron andcontains less than 10 atomic percent of any other non-magnetic elementschosen from chromium(Cr), tantalum(Ta), zirconium(Zr), hafnium(Hf).

The layer 120 is typically made of magnetic material whose grains areweakly exchange coupled. The alloy in the layer 120 is typically one ormany of ferromagnetic elements Co,Fe and Ni, and contains less than 20atomic percent of platinum, Pt. It also contains up to 20 atomic percentof one or more of the following elements: phosphorous (P), boron(B),chromium(Cr), tantalum(Ta), tungsten(W), molybdenum(Mo).

The top electrode 124 and the bottom electrode 108 are each made ofTantalum (Ta) in an exemplary embodiment although other suitablematerials are contemplated per the requirements of the etching process.

The layer 110 is an anti-ferromagnetic (AF) pinning layer. Morespecifically, for example, the magnetic moment of the layer 110 helps topin the magnetic moment of the layer 112. The magnetic moment of thelayer 110 is permanently fixed.

The layer 118 is a granular layer which is used to obtain lowerswitching current of the memory element during the “program” or write or“erase” operations to the memory element. The layer 118, in oneembodiment of the present invention, is made of (CoxFe(1−x))(Z) where, xthe atomic percent and can be a value in the range of 0 to 1 where 1refers to 100 atomic percent. Z is typically a compound chosen from anyof the following list of compounds and can be a mixture of these:Titatnium oxide(TiO₂), silicon oxide(SiO₂), tantalum oxide(Ta₂O₅),tungsten oxide (WO), Aluminum oxide(Al₂O₃), tantalum nitride(TaN),titanium nitride(TiN). One of the selection criteria for selection ofcompound Z is that it should have a high heat of formation and otherbeing low solubility in the base magnetic alloy Co—Fe. This enables“granular” micro-structure of this film during deposition by having thebase elements couple together to form the center of the grains which areisolated from each other by compound Z which tend to segregate at thegrain-boundary regions.

The layer 122 is the cap layer has a substantially cubic crystalstructure having a closer lattice match with cubic Cobalt or cubiccobalt alloys. It is essential that the fixed layer 112, tunnel layer114 and free-layers 116 and 120 be substantially amorphous ornano-crystalline following deposition. These are then annealed,typically combined with the magnetic anneal process which is used forsetting the pinning layer as well as the orientation of the fixed layer.It is important that this also coincides with the magnetic anisotropydirection which arises from two effects namely, the shape which is keptelongated with the long axis aligned with the preferred direction andthe applied magnetic field direction during deposition of the fixed andfree-layers. The annealing temperature is typically over 350 C. degreesand the time is typically greater than an hour. The heat energy fromannealing causes the layer 114 in conjunction with the adjacentamorphous magnetic layers of 112, 116 and 120 to transform into cubic(001) structure which has been shown to form coherent channels leadingto very high TMR. By choosing a proper cubic cap-layer, the cubictransformation is facilitated with ease at a lower temperature.

The layer 122, in one embodiment of the present invention, is madesubstantially of one or more of the following layers: RuCr, NiAl, NiRu,NiAlRu, NiZr, Cu/Ru, Au/Ru. A typical thickness of this layer is 5-50nm. In one embodiment, RuCr having 30 atomic percent chromium, Cr, isused as the caplayer.

Typical thicknesses for each of the layers of the memory element 100 arenow presented. However, these sizes are merely examples, as otherthicknesses are anticipated. A typical thickness of each of the topelectrode 124 and the bottom electrode 108 is 30 to 200 nm. While apreferred thickness is typically 50 nm, the actual thickness choice maydepend on the requirements from the metallization process as well as theetching process. The layer 110 is typically 20 to 100 nm in thicknesswith a preferred thickness of 25-50 nm.

In one embodiment of the present invention, the layer 112 ismulti-layered. In an exemplary embodiment, the layer 112 is made ofthree layers of Cobalt-Iron(CoFe)/Ruthenium(Ru)/Cobalt-Iron-Boron(CoFeB)with CoFe layer is formed adjacent to or on top of the layer 110 and theCoFeB layer is formed adjacent to or below the layer 114 so that betweenthe layers 110 and 114 are CoFe on top of which is formed Ru on top ofwhich is formed CoFeB. The typical thickness of the CoFe layer is 3 to10 nm and that of Ru layer is 0.6 to 1.0 nm to create anti-ferromagneticcoupling between the two adjacent magnetic layers of CoFe and CoFeB. TheCoFeB layer is typically 2 to 10 nm thick with a preferred range of 2.5to 5 nm.

The barrier (or tunnel) layer 114 has a typical thickness of 0.8 to 3nano meters (nm).

During manufacturing, the layers of the memory element 100 are formed inthe manner described hereinabove. Additionally, an annealing process,which is well known, is performed heating the memory element 100 in thepresence of a magnetic field. Following the annealing process, themagnetic moments of the layer 112 are oriented in a particularorientation.

During operation, current is applied, in a direction that issubstantially perpendicular relative to the plane of the magnetic layersof the memory element 100 of FIG. 2, either from a direction indicatedby the arrow 130 or a direction indicated by the arrow 132. When currentis applied, depending on the level of current and the direction of thecurrent, the magnetic moment of the layers 116 and 120 are caused to beswitched to an opposite direction, or left in the same in-planedirection as that of the layer 112.

The state of the magnetic moment of the MTJ 126 defines the state of thememory element 100. It is important to note that the alloy of which thelayer 120 is made is different than that from which the layer 116 ismade. The layer 116 is magnetically more exchange coupled than the layer120. The structure of the free layer 106, as depicted in FIG. 2, has thegrains of the layer 120 are magnetically weekly exchange-coupled fromeach other. During the switching process, at the time of programming anderasing, it is not until a substantial number of magnetic grains oflayer 120 have switched that these grains couple together and build acritical volume to cause an avalanche type switching of the rest of thegrains of 120. Once the grains are switched they are magnetostaticallycoupled together with the neighboring grains leading to an increased“magnetic volume”. This results in high thermal stability while lowerswitching current is experienced. Perhaps a greater understanding ofthis concept is had with respect to further details of the structure ofthe layer 120, relative to subsequent figures.

FIG. 3 shows further details of the layer 120, in accordance with anembodiment of the present invention. In FIG. 3, a perspective side viewof the layer 120 is shown to include a number of grains 142. Before themagnetic moment of the layer 120 is switched, for example, prior toapplying current, the direction of the magnetic moment of each of thegrains 142, as shown by the direction of their respective arrowstherein, is random. When current is applied, the direction of themagnetic moment of each of the grains 142 starts to switch but it is notuntil at least a substantial number of magnetic moments of the grainshave switched when the magnetic moment of the layer 120 switches. Whilenot shown in FIG. 3, the grains 142 are weakly magneticallyexchange-coupled by grain boundaries, which causes weak coupling betweenthe grains. This is perhaps better understood relative to FIGS. 4( a)and 4(b). FIGS. 4( a) and 4(b) each show further details of the layer120 of the memory element 100.

In FIG. 4( a), two grains are shown as grain 144 and grain 146. Thegrains 144 and 146 are separated from each other by a grain boundary143. The grain boundary 143 causes weak magnetic exchange-coupling ofthe grains, primarily from the selection of the alloy as well as theprocess conditions which causes the non-magnetic constituent of thealloy of layer 120, such as chromium(Cr), boron(B), etc. to segregate atthe grain boundary 143. Until all or a substantial number of magneticgrains of a grain have switched their magnetic moment at which time agrain is coupled to its neighboring grain through magneto-staticcoupling. The grain 144 is shown to be touching magnetic grains 148 ofthe granular layer 118 and the grain 146 is shown to be touchingmagnetic grains 150 of the granular layer 118. When current is appliedto the memory element 100, the magnetic moment of each of the grains 150of the granular layer 118 and each of the magnetic moments 148 of thegranular layer 118 start switching which causes the magnetization ofgrains 144 and 146 to switch, and when a substantial number of magneticgrains of either of the grains 144 and 146 have switched, its respectivegrain couples to its neighboring grains of layer 120.

FIG. 4( b) shows a three dimensional view of the grain 144 with magneticgrains 148 of the granular layer 118. The latter are shown to becylindrical in shape. A discussion of the physics of the structure ofthe magnetic moment 100 is now briefly presented.

The current-switching effect of the magnetic moment 100 arises from theinteraction between magnetic moments and the transport current. Thisresults from current-induced magnetic field and spin-torque from thecurrent induced spin polarization. While the current-induced effectthrough the magnetic field is directly proportion to r (r being thedistance, the later spin-torque effect is proportional to r². The torquegenerated by spins through the momentum transfer of tunneled polarizedspins from the layer 112, which opposes the “intrinsic” damping of spinsof the free layer (or layer 106). At sufficient current, this canreverse the direction of the magnetization in the free layer, as shownby the direction of the arrow in the layer 106 relative to that of thelayer 102, in FIG. 1. In one embodiment the current required to switchthe memory element (program or write current) of size 200 nm* 130 nm,using the 130 nm CMOS process, is about 300 micro-amps. In a yet anotherembodiment, the program current for a memory element of size 120 nm*90nm, using 90 nm CMOS process, is about 200 micro-amps.

The critical current required for such switching is defined in Eq. (1),as follows:

Ic=Ic ₀[1−(k _(B) T/K _(u) V)In(t _(p) /t ₀)]  Eq. (1)

Where Ic₀ is the critical switching current density without thermalfluctuation; k_(B) is the Boltzman constant; T is temperature; K_(u) iseffective uniaxial anisotropy and V is the volume of the free-layer 106;t₀ is the inverse of the procession frequency of the spin (less than 1ns); t_(p) is the pulse width of the switching current.

One common way to reduce the critical switching is by reducing eitherK_(u) or V of the free layer. Additionally, the switching current can bereduced by lowering the thickness of the free layer but this maycompromise the reliability by making the memory element more thermallyunstable. A memory element with its free layer having higher KuV is morethermally stable at higher temperatures. As a general rule of thumb, themagnetic energy, KuV, of the free layer is greater than approximately 80k_(B)T where, k_(B) is the Boltzmann constant and T is the ambienttemperature.

The various embodiments of the present invention use magnetizationreversal taking place in nano-seconds time scale, and the relativestrengths of inter-granular exchange coupling and magnetostatic couplingbetween the neighboring grains to increase thermal stability whilemaintaining low switching current. The exchange coupling is generallymuch stronger than the magnetostatic coupling. This could lead to adifferent value of “V” corresponding to the switching volume and thevolume responsible for keeping the thermal stability. More specifically,in the embodiments of the present invention, ways to keep the switchingvolume small are disclosed while keeping the “volume” responsible forthermal stability large. This results in a lower “writing” or“programming” current while maintaining higher thermal stability.Exchange coupling occurs at spin-to-spin level and is short rangecoupling and advantageously weaker in the layer 120, while,magnetostatic coupling depends on the distance between grains, which aretypically on the order of a few angstroms. Due to the difference inmaterial between the layers 120 and 116, the volume of each of thelayers 120 and 116 is multiplied by K_(u) to yield K_(u) (V₁+V₂) orK₁V₁+K₂V₂ where V₁ is the volume of the layer 116 and V₂ is the volumeof the layer 120.

FIG. 5 shows a non-volatile current-switching magnetic memory element200 in accordance with another embodiment of the present invention. Thememory element 200 is shown to include a bottom electrode 202 on top ofwhich is formed a pinning layer 204 on top of which is formed aferromagnetic layer 206 on top of which is formed a syntheticanti-ferromagnetic coupling layer 208 on top of which is formed aferromagnetic layer 210 on top of which is formed a tunnel (or barrier)layer 212, on top of which is shown formed a ferromagnetic layer 214, ontop of which is shown formed a granular ferromagnetic layer 216, on topof which is shown formed a ferromagnetic layer 218, on top of which isshown formed a synthetic anti-ferromagnetic coupling layer 220, on topof which is formed a super-paramagnetic layer 222, on top of which isshown formed a synthetic anti-ferromagnetic coupling layer 224, on topof which is shown formed a super-paramagnetic layer 226, on top of whichis shown formed a top electrode 228. The layers 224 and 220 aregenerally magnetic coupling layers. In an exemplary embodiment, theselayers are each between 6 to 9 angstroms in thickness. The layers 214and 218, while both free layers, are each made of material that isdifferent than the other, such as discussed relative to the layers 120and 116 of FIG. 2. In another embodiment however, the same material isused for both layers 218 and 214. The layer 216 is made of the samematerial and is generally the same size as that of the layer 118 of FIG.2. Similarly, the layer 204 is the same as that of the layer 110 and theelectrodes 202 and 228 are the same as the electrodes 108 and 124.

In an exemplary embodiment, the layer 206 is made of CoFe and has athickness in the range of 3 to 25 nm. The layer 208 is made of Ru orRuCr having less than 30 atomic percent of chromium, Cr, and is 12-20angstroms in thickness. The layer 208 is advantageously thicker thaneach of the layers 224 and 220.

The layers 222 and 226 are each made of super paramagnetic materialhaving the characteristic of lacking a magnetic state (preferredanisotropy) at room temperature. This is essential in overcoming a priorart problem of using certain magnetic material that exhibit magneticpreferred anisotropy at room temperature, whereas, super paramagneticmaterial do not. For example, super paramagnetic materials are generallybetween 10-30 K_(B)T at room temperature.

As in the case of the embodiment of FIG. 2, the layers 112 through 120make up a MTJ. Furthermore, in FIG. 5, the layers 214 through 226comprise the free layer, such as the free layer 106 of FIG. 1.

The embodiment of FIG. 5 shows the free layer to be multi-layered andusing super paramagnetic material as some of the multiple layers. Asnoted earlier, the layers 220 and 224 are made of Ru, in one embodimentof the present invention. The layers 226 and 222 are made of RuCr,having less than 40 atomic percent of chromium, Cr, in an exemplaryembodiment of the present invention. The thickness of layers 222 and 226are typically kept below 10 nm. In one exemplary embodiment it is lessthan 2 nm thick of Co(30 at %)Fe(50 at % Cr(10 at %)B(10 at %) where at% refers to the atomic percent of the constituent element. In a yetanother exemplary embodiment these layers are less than 3 nm and containless than 20 atomic percent of nickel, Ni.

The embodiment of FIG. 5 offers added volume for the free layer thanthat of the embodiment of FIG. 2. Advantageously, added volume isachieved without impacting the switching current by the memory element200 of FIG. 5.

The layer 216 has the same structure and exhibits the samecharacteristics as those discussed relative to the layer 118 of FIG. 2and the layer 218 similarly has the same structure and exhibits the samecharacteristics as those discussed relative to the layer 120 of FIGS. 3,4(a) and 4(b).

In operation, whenever the magnetic moment of the layer 218 switches orflips to an opposite direction than, for example, an in-planedirection(“left” or “right” as marked by the arrows), the layers 220 and224 follow suit. Before such time however, the direction of the magneticmoments of the layers 224 and 220 are random. More specifically, themagnetic moment of the layers 214 and 218 switch direction followed bythe magnetic moment of the layers 220 and 224 switching direction totake on an orientation or direction that is the same as that of thelayer 218. In this manner, the free layer that includes the layers 214through 226, in essence, has a greater volume than that of theembodiment of FIG. 2 and that of prior art structures, allowing forgreater thermal stability while maintaining low switching current.

In an exemplary embodiment of the present invention, the thermalstability of memory cell of dimensions 60 nm*45 nm made using 45 nmprocess goes up from 79 K_(B)T to 112 K_(B)T by adding 1.5 nm thicklayers of 222 and 226 using a CoFeNiB film having a magneto-crystallineanisotropy of about 2*10⁵ erg/cc, while maintaining the sameprogram/erase current of about 100 micro-amps. In a yet anotherexemplary embodiment, the thickness of layer 218 and 214 are kept atless than 2 nm for a 90 nm*120 nm memory cell using 90 nm process has athermal stability of 181 K_(B)T while having a program/erase current ofabout 200 micro-amps.

FIG. 6 shows a non-volatile current-switching magnetic memory element300 in accordance with yet another embodiment of the present invention.The memory element 300 is shown to include a bottom electrode 302 on topof which is formed a pinning layer 304 on top of which is shown formed amulti-layered fixed layer 340. The layer 340 is shown having multiplelayers and in one embodiment of the present invention, it is showncomprising the ferromagnetic layer 306, which is shown formed on top ofthe layer 304 and on top of the layer 306 is shown formed a syntheticanti-ferromagnetic coupling layer 308 on top of which is shown formed asubstantially amorphous ferromagnetic layer 310. The layers 306 through310 are shown to form the fixed layer 340. In an exemplary embodiment,the layers 306 through 310 are made of Cobalt-Iron(CoFe), Ruthenium(Ru)and Cobalt-Iron-Boron(CoFeB), respectively.

On top of the layer 310 of the fixed layer 340 is shown formed a tunnel(or barrier) layer 312. On top of the layer 312 is shown formed a freelayer 314 on top of which is shown formed a granular film layer 316, ontop of which is shown formed a free layer 318, on top of which is shownformed a magnetic coupling layer 320, on top of which is shown formed asuper paramagnetic granular layer 322 on top of which is shown formed amagnetic coupling layer 324, on top of which is shown formed a superparamagnetic granular layer 326, on top of which is shown formed a topelectrode 328.

The layers 326 and 322 are shown to each include magnetic regions 332dispersed between non-magnetic regions 330. In one embodiment of thepresent invention, the regions 332 are made largely of cobalt(Co),Iron(Fe), Nickel(Ni) and boron(B) and the-regions 330 are made oftitatnium oxide(TiO₂), silicon oxide(SiO₂), tantalum oxide(Ta₂O₅),tungsten oxide (WO), Aluminum oxide(Al₂O₃), tantalum nitride(TaN),titanium nitride(TiN). In an embodiment of the present invention, thelayers 320 and 324 are each made of Ru or RuCr. The regions 322 and 326are each of super paramagnetic material but they each have less oxide ornitride in layers above them thereby exhibiting stronger magneto-staticcoupling with neighboring layer and no exchange coupling betweenneighboring grains. This enables addition of additional “magnetic”volume to the free-layer and thereby increasing the thermal stabilitywithout impacting the switching current or the program/erase current.The super-paramagnetic regions 322 and 326 do not have any preferredanisotropic direction of their own. Once the free-layers 314, 316 and318 switch either to the “left” or to the “right” as marked by arrow,the regions 322 and 326 couple to them and take their direction andthere by add “magnetic volume” to enhance the thermal stability withoutimpacting the impacting the program/erase current, also referred to asthe write-ability. As shown in the FIG. 7, 702 is a plot ofthermal-stability versus write-ability. The approaches taught per thisinvention enable the performance to move into curve 702 which may or maynot be exactly parallel but would lie on the right side of the curvewhich essentially implies higher thermal stability for samewrite-ability. Depending upon the memory cell design and choice ofmaterials, the write-ability and the thermal stability can be traded orcompromised against one-another.

In a yet another embodiment shown in FIG. 8, the memory element 800 and802 are shown to have substantially “perpendicular” magnetic momentswith-respect to the substrate-wafer surface (or the x-axis in plane withthe page). As shown in FIG. 8, memory cells, made up of the memoryelement 800 and 802, advantageously, enables closer spacing betweenneighboring cells thereby enabling higher density, as compared to thein-plane oriented memory cells shown in FIG. 9. In the in-plane orientedmemory cells of FIG. 9, the spacing, s, which is the distance betweenthe memory cells 900 and 902, is limited by the magnetic interactionfield between the adjacent magnetic memory cells. The minimum spacingscales with lithography technology. Thus, use of the memory element 800and 802 results in dense or more compact memory, which is clearlydesirable for reasons among which are cost and size.

It should be noted that while few perpendicular designs have beensuggested based on Co/Pt multi-layers, they suffer from having extremelyhigh switching currents and thereby making such designs unsuitable formemory applications. Additionally, such designs are based on Co/Ptmulti-layers and therefore difficult to manufacture thereby making themmore expensive.

The memory cells 800 and 802 of FIG. 8, made of the memory element 1100are substantially perpendicular to the substrate surface having a shapesubstantially square (in-plane). FIG. 10 shows another example of memorycells that are substantially round in shape. These memory cells have amuch closer spacing between the adjacent memory cells, i.e. memory cells800 and 802, the space between the memory cells 800 and 802 being sp,compared to the memory cells having in-plane as shown in FIG. 9.

FIG. 11 shows the memory element 1100, in accordance with anotherembodiment of the present invention having substantially “perpendicular”magnetic moments with-respect to the substrate-wafer surface (or thex-axis in plane with the page). In FIG. 11, the memory element 1100 isshown to include a bottom electrode 1102, on top of which is shownformed a seeding layer 1130 on top of which is shown formed a fixedlayer 1132, on top of which is shown formed a tunnel layer 1116, on topof which is shown formed a free layer 1134 on top of which is shownformed a cap layer 1122, on top of which is shown formed a top electrode1124. The cap layer 1122, as in all of the cap layers of the embodimentsdiscussed and shown herein is generally non-magnetic. The layers 1132,1116 and 1134 comprise a MTJ in the embodiment of FIG. 11.

The layer 1130 is shown to be multi-layered. In an exemplary embodiment,the layer 1130 is formed of a CoFeB—Cr—Z layer 1104, which is shownformed on top of the bottom electrode 1102 and on top of the layer 1104is shown formed a non-magnetic layer 1106 and top of the layer 1106 isshown formed a Ru—X layer 1108 where X is one or many of chromium, Cr,molybdenum, Mo, tantalum, Ta, and tungsten, W. The layers 1104, 1106 and1108 comprise the layer 1130.

The layer 1132 is shown to be multi-layered. In an exemplary embodiment,the layer 1132 is formed of a CoCrPt—X layer 1110, which is shown formedon top of the layer 1108 and on top of the layer 1110 is shown formed aCoCrPtB layer 1112 and top of the layer 1112 is shown formed a CoFeB—Ylayer 1114. The layers 1104, 1106 and 1108 comprise the layer 1130. Thetunnel layer, in an exemplary embodiment is made of MgO, although othermaterial, such as those listed for the tunnel layer of FIG. 2, may beemployed.

The layer 1134 is shown to be multi-layered. In an exemplary embodiment,the layer 1134 is formed of a CoFeB—Y layer 1118, which is shown formedon top of the layer 1116 and on top of the layer 1118 is shown formed agranular magnetic layer 1120 and top of the layer 1120 is shown formed ayet another granular magnetic layer 1121. The layers 1118, 1120 and 1121comprise the layer 1134. The element X for layer 1110 can be chosen fromone or more of: molybdenum, Mo, tantalum, Ta, titanium, Ti, silicon, Si,boron, B, and phosphorus, P. The element Y for layers 1112 and 1118 canbe same as element X but the atomic percent is typically kept below 15atomic percent. The typical thickness of layer 1106 is greater than 10nm, layer 1108 layer is greater than 5 nm. In one exemplary embodiment,the layer 1106 is 20 nm thick and the layer 1130 has two parts, oneadjacent to layer 1106 is deposited at a lower argon pressure of 2 mtorrand is 6 nm thick, and another layer deposited right on top of 8 nmthickness and deposited at a higher argon pressure of 10 mtorr. Thetypical thickness of the layers of the fixed layer 1132, layer 1110 istypically greater than 10 nm, the layer 1112 is 2-10 nm and layer 1114is 1-3 nm thick. In one exemplary embodiment, the layer 1110 is 20 nmthick, layer 1112 is 2 nm thick and layer 114 is 3 nm thick.

In FIG. 11, the layers 1114, 1116 and 1118 are substantially amorphouswhen deposited or formed on top of the layer below them. After anannealing process, which is performed after all of the layers of thememory element 1100 are deposited, the foregoing layers are modified tocreate a spin filter to allow spin up or spin down to go through theadjacent layers. In FIG. 11, the layers 1118 and 1114 are made of thesame material.

The layers 1110 and 1112, in an exemplary embodiment, are thicker insize than 10 nm so that their orientation is substantially perpendicularand are maintained in the same state.

The layer 1116 is more cubic when deposited. After annealing because,for example, MgO transforms more cubic (or 001) and transforms thelayers 1114 and 1118 into cubic cobolt. The layer 1130 is atomicallywell matched to allow growth of the layer 1132.

The layers of the memory element 1100 are deposited sequentially inhigh-vacuum cluster tool system to ensure excellent epitaxial growth.The layer 1104 is typically a magnetic or a nonmagnetic alloy. Layer1104 and the bottom electrode 1102 and may be grown on additionalmetallic layers which are grown directly over the wafer (a waferincludes many memory elements formed thereon) which includes a CMOStransistor and metallic contacts.

It is essential that there is an excellent electrical contact made withthe “contact”. In an exemplary embodiment, the layer 1106 is typicallyTi with a thickness of 20-100 nm. Additional choices of material for thelayer 1106 are TiTa, TiW. The layer 1108 is made primarily of Ru toensure proper epitaxial growth of layer 1110. Advantageously, the layer1108 is grown in two steps with the first layer adjacent to the layer1106 being grown under a lower argon pressure (such as below 10millitorr (mtorr), preferably around 1 mtorr) and the surface closer tothe layer 1110 side is grown at a much higher argon pressure (such asover 10 mtorr, preferably around 15-20 mtorr). This creates a uniquesurface to facilitate columnar growth of the subsequent magnetic layer1110. Layer 1110 comprises of CoCrPt—X where X is chosen from TiO2,SiO2, Al2O3, Ta2O5, ZrO2. The preferred alloy for layer 1110 isCoCr(6-15 at %)Pt(<12 at %)-(2-20 mol %)TiO2. Other preferred alloy forlayer 1110 is CoCr(6-15 at %)Pt(<12 at% )-(2-20 mol %)SiO2.

The selected oxides have high level of immiscibility in the base alloythereby resulting in nice cylindrical columns. These columns have twoeffects, namely they increase the local magnetic field to assistswitching of the free-layers 1118, 1120 and 1121. The local magneticfield is inversely proportional to radius of the column. Additionally,these channels act as channels for enhancing the local current densityfor the spin-polarized current. One hypothesis is that these channelsact as current-concentrator for the spin polarized spins which travelthrough the subsequent layers and create sites to initiatespin-switching in the free-layers 1118, 1120 and 1121. The net result isthat the switching in the free-layer initiates at multiple locations andthereby leading to a lower switching current through acceleratedavalanche switching. Layer 1110 has a typical thickness of about 20-30nm in order to ensure perpendicular anisotropy of the magnetic momentswhereby the magnetic moments in that layer stay normal to the filmplane, as indicated through the arrows in layer 1110 in FIG. 11. Layer1112 having a typical layer of 1-5 nm and having a composition ofCoCr(<12 at %)Pt(<12 at %)B(<12 at %) is deposited directly on top ofthe layer 1110. The magnetic moment of the layer 1112 is expected to besubstantially perpendicular. Layer 1114 is 1-5 nm thick, preferably 2-3nm and is made of CoFe(40-60 at %)B(10-20 at %) which is largelyamorphous in the as-deposited state. Layer 1116 is 0.8-2 nm thick and ismade of MgOx (x=0.9-1.1). Layer 1118 is same as layer 1114 and is 1-2 nmthick.

The deposition process and the design of layers 1114, 1116 and 1118 arevery important for building a high performance memory. Layer 1120 isdesigned to get low program (switching current). The dark areas in layer1120 corresponds to the “oxide” of the starting material which aretypically CoFe (0-100%)-TiO2 which are deposited by sputtering (rf ordc-magnetron) through a composite target consisting of magnetic alloyand the oxide. The magnetic grains and the oxide zone separate duringthe process of deposition, primarily because they are largelyimmiscible. Typically a larger proportion of oxide such as over 10 mol %is used to get well separated and smaller grains of magnetic which actas an initiator of magnetization switching in the layer 1121. Layer 1121is typically 2-5 nm thick and is made of CoCrPtB having substantiallynormal magnetic moment. As shown in FIG. 11 the moment of this layerstays in two directions: up or down. Layers 1118, 1120, 1121 are calledthe free-layer, as compared to layers 1114, 1112 and 1110 which arecollectively referred to as the fixed-layer. Layer 1122 is the cap layerwhich is deposited directly on top of the layer 1121, and is typicallyabout 50 to 100 nm thick and is made of Ta. Other materials can be Ti,W, TiW. The choice of the material, its process and thickness may dependon the choice of the reactive etch process which is used to etch themagnetic films following different photo-mask steps to get the rightdimension of the memory element.

One of the key processes is the magnetic annealing process where themagnetic films are exposed to a magnetic field of 4-10 KOe appliednormal to the wafer surface at a temperature of typically over 350 C. Inone embodiment, a magnetic field of 5 KOe is applied normal to the wafersurface at a temperature of 375 C. for 2 hours. The role of theapplication of the magnetic field is to set the magnetic-orientation ofthe fixed-layers. The field exposure time does not have to be as longand can be as short as few minutes. The net effect of the temperatureannealing is to cause recrystallization in the MgO of layer 1116 whichcauses recrystallization in the layers 1114 and 1118. This is a verycritical step to ensure high TMR, tunneling magneto-resistance, which isrelated to the ratio of resistance of two states.

FIG. 7 shows a graph 702 of the thermal stability (shown on the y-axis)relative to the write-ability (shown on the x-axis). The thermalstability is effectively reliability and write-ability is the currentfor program and erase. The graph 702 represents the improvement of thethermal stability as well as the write-ability of memory made of thememory elements of the various embodiments of the present invention. Asshow by the line 700, the percentage of improvement is approximatelyover twenty percent.

FIG. 12 shows a memory architecture 1200 incorporating the memoryelements of the various embodiments of the present invention. Inparticular, FIG. 12 shows a magnetic tunnel junction, such as themagnetic tunnel junction (MTJ) 1202 coupled to an access transistor1204, in accordance with an embodiment of the present invention. In FIG.12, the MTJ 1202 is shown coupled, through an electrode 1206, to a bitline 1208, on one of its ends. On the other end, the MTJ 1202 is showncoupled to a bottom electrode 1220 (BE), through a contact, which isalso shown coupled to a drain gate of a transistor 1212. The transistor1204 further includes a source shown coupled to the program/erase line1210.

The gate 1214 of the transistor 1204 is shown coupled to a word line1216. The embodiment of the FIG. 12 may be referred to as a single or1-cell architecture. The MTJ also referred to as the memory element 100acts as the non-volatile memory element. The MTJ element has lowresistance in the programmed state and higher resistance in the erasedstate. For example, in one embodiment of the present invention, theresistance for the low state is at least half of that of the high state.Low and high refer to binary states of ‘1’ and ‘0’ or vice versa. MTJelement or the memory element 100 is shown to have one transistor inseries with it for accessing the memory element. The bit line 1208 ismade of metal and the word line 1216 is made of poly-silicon.

In operation, the MTJ 1202 is accessed in the following manner. Thememory (or MTJ) element 100 in conjunction with the access transistor1204 form a memory cell. To program the cell, the bit line 1208 isconnected to some positive power supply while the Prog/Erase line 1210grounded. By accessing this cell the word line 1216 is raised to somevoltage. This turns the transistor 1204 on and current flows from bitline 1208 to Prog/erase line 1210. Electrons flow in the oppositedirection, and go through the fixed layer of the memory element 100 (orMTJ 1202) before entering the free layers. This causes the magneticorientation of the free layers to align with the fix layer and theresistance (R) of the memory element 100 dropped to the minimum. Theerase operation on the other hand is performed by changing the directionof the bit line and the program/erase line. This time the Prog/eraseline is biased positive while the bit line is grounded. The current willflow from Prog/erase line to bit line, or electrons flow from bit lineto Prog/erase line. Since the free and fix layers are magneticallyaligned (programmed state), then minority electrons are reflected fromthe fix layer back into the free layer. These electrons have a spinorientation which is the opposite of the fix layer. When they areinjected into the free layer, they apply a moment on the magneticelements of the free layer in the opposite direction. By pushing enoughelectrons through eventually the magnetic orientation of the free layerschange in the anti-parallel direction, and the MTJ resistance maximizes.

In alternative embodiments, the granular layers, such as the layers1120, 316 and 216, of the various embodiments disclosed herein may be anon-uniform switching layer, such as the non-uniform switching-initiatorlayer (NSL), such as those disclosed in U.S. patent application Ser. No.11/674,124 and entitled “Non-uniform Switching Based Non-VolatileMagnetic Base Memory”, referenced hereinabove, the disclosure of whichis incorporated herein as though set forth in full.

In yet another embodiment of the present invention, the MTJs of thevarious embodiments disclosed herein may be stacked to form amulti-state current-switching magnetic memory element, such as thosedisclosed in U.S. patent application Ser. No. 11/678,515 and entitled “AHigh Capacity Low Cost Multi-State Magnetic Memory”, referencedhereinabove, the disclosure of which is incorporated herein, as thoughset forth in full.

It should be noted that the objects of the drawings or figures discussedand presented herein are not necessarily drawn to scale.

Although the present invention has been described in terms of specificembodiments, it is anticipated that alterations and modificationsthereof will no doubt become apparent to those skilled in the art. It istherefore intended that the following claims be interpreted as coveringall such alterations and modification as fall within the true spirit andscope of the invention.

1. A non-volatile current-switching magnetic memory element capable ofstoring information when current flows therethrough, comprising: apinning layer; a first ferromagnetic layer formed on top of the pinninglayer; a first synthetic anti-ferromagnetic coupling layer formed on topof the first ferromagnetic layer, the first synthetic anti-ferromagneticcoupling layer having a thickness; a second ferromagnetic layer formedon top of the first synthetic anti-ferromagnetic coupling layer; atunnel layer formed on top of the second ferromagnetic layer; a freelayer including, a third ferromagnetic layer formed on top of the tunnellayer, a granular ferromagnetic layer formed on top of the thirdferromagnetic layer, the granular film layer being made of a basemagnetic alloy having a compound and having a granular micro-structurewith grains that, prior to the application of current to the magneticmemory element, have random magnetic moments associated therewith andare separated from each other by grain boundaries, the granular filmlayer being made of (Co_(x)Fe_((1−x))(Z), wherein x is the atomicpercent and is a value in the range of greater than 0 to 1 where 1refers to 100 atomic percent and wherein Z is a compound chosen from anyof the following list of compounds and can be a mixture of: Titatniumoxide (TiO₂), tantalum oxide (Ta₂O₅), tungsten oxide (WO), tantalumnitride (TaN), or titanium nitride (TiN), a fourth ferromagnetic layerformed on top of the granular ferromagnetic layer, and magnetic couplinglayers including a second synthetic anti-ferromagnetic coupling layerand a third synthetic anti-ferromagnetic coupling layer, the secondsynthetic anti-ferromagnetic coupling layer and the third syntheticanti-ferromagnetic coupling layer separated from each other by a firstsuper-paramagnetic layer, the second synthetic anti-ferromagneticcoupling layer formed on top of the fourth ferromagnetic layer, thesecond synthetic anti-ferromagnetic coupling layer and a third syntheticanti-ferromagnetic coupling layer each having a thickness; a topelectrode formed on top of the magnetic coupling layers, wherein thethickness of the first synthetic anti-ferromagnetic coupling layer beinggreater than the thickness of each of the second syntheticanti-ferromagnetic coupling layer and third synthetic anti-ferromagneticcoupling layers.
 2. A non-volatile current-switching magnetic memoryelement, as recited in claim 1, wherein the first ferromagnetic layer ismade of CoFe and has a thickness in the range of 3 to 25 nm.
 3. Anon-volatile current-switching magnetic memory element, as recited inclaim 1, wherein the first synthetic anti-ferromagnetic coupling layeris made of Ru or RuCr having less than 30 atomic percent of chromium,Cr.
 4. A non-volatile current-switching magnetic memory element, asrecited in claim 1, wherein the first synthetic anti-ferromagneticcoupling layer has a thickness of 0.6 to 1.0 nm.
 5. A non-volatilecurrent-switching magnetic memory element, as recited in claim 1,wherein each of the second and third synthetic anti-ferromagneticcoupling layers are made of Ru.
 6. A non-volatile current-switchingmagnetic memory element, as recited in claim 1, wherein the free layerfurther includes a second super-paramagnetic layer formed on top of thethird synthetic anti-ferromagnetic coupling layer.
 7. A non-volatilecurrent-switching magnetic memory element, as recited in claim 6,wherein each of the first and second super-paramagnetic layers are madeof RuCr and have less than 40 atomic percent of chromium.
 8. Anon-volatile current-switching magnetic memory element, as recited inclaim 7, wherein the first super-paramagnetic layer and the secondsuper-paramagnetic layer each have a thermal stability between 10-30K_(B)T.
 9. A non-volatile current-switching magnetic memory element, asrecited in claim 7, wherein the first super-paramagnetic layer and thesecond super-paramagnetic layer each have a thickness that is below 10nm.
 10. A non-volatile current-switching magnetic memory element, asrecited in claim 7, wherein the first super-paramagnetic layer and thesecond super-paramagnetic layer each have a thickness that is less than2 nm of Co(30 at %)Fe(50 at % Cr(10 at %)B(10 at %) where at % is theatomic percent of the constituent element.
 11. A non-volatilecurrent-switching magnetic memory element, as recited in claim 7,wherein the first super-paramagnetic layer and the secondsuper-paramagnetic layer each have a thickness that is less than 3 nmand contain less than 20 atomic percent of nickel.
 12. A non-volatilecurrent-switching magnetic memory element, as recited in claim 7,wherein the non-volatile current-switching magnetic memory element has adimension of 60 nm*45 nm made using 45 nm process with a thermalstability of up to 112 K_(B)T.
 13. A non-volatile current-switchingmagnetic memory element, as recited in claim 7, wherein each of thefirst super-paramagnetic layer and the second super-paramagnetic layerincludes a CoFeNiB film having a magneto-crystalline anisotropy ofsubstantially 2*10⁵ erg/cc.
 14. A non-volatile current-switchingmagnetic memory element, as recited in claim 7, wherein the non-volatilecurrent-switching magnetic memory element is manufactured using a 90 nmprocess and has a dimension of 90 nm*120 nm and wherein the thickness ofeach of the third and fourth ferromagnetic layers is maintained at lessthan 2 nm and the thermal stability of the non-volatilecurrent-switching magnetic memory element is 181 K_(B)T.